JPH0359033B2 - - Google Patents

Info

Publication number
JPH0359033B2
JPH0359033B2 JP59267006A JP26700684A JPH0359033B2 JP H0359033 B2 JPH0359033 B2 JP H0359033B2 JP 59267006 A JP59267006 A JP 59267006A JP 26700684 A JP26700684 A JP 26700684A JP H0359033 B2 JPH0359033 B2 JP H0359033B2
Authority
JP
Japan
Prior art keywords
silicon carbide
sintered body
weight
dimensional accuracy
density
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59267006A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61143686A (ja
Inventor
Kyotaka Tsukada
Masakazu Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Original Assignee
Ibiden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd filed Critical Ibiden Co Ltd
Priority to JP59267006A priority Critical patent/JPS61143686A/ja
Publication of JPS61143686A publication Critical patent/JPS61143686A/ja
Publication of JPH0359033B2 publication Critical patent/JPH0359033B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
  • Furnace Charging Or Discharging (AREA)
JP59267006A 1984-12-18 1984-12-18 寸法精度の優れた耐熱性治具用炭化珪素質焼結体 Granted JPS61143686A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59267006A JPS61143686A (ja) 1984-12-18 1984-12-18 寸法精度の優れた耐熱性治具用炭化珪素質焼結体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59267006A JPS61143686A (ja) 1984-12-18 1984-12-18 寸法精度の優れた耐熱性治具用炭化珪素質焼結体

Publications (2)

Publication Number Publication Date
JPS61143686A JPS61143686A (ja) 1986-07-01
JPH0359033B2 true JPH0359033B2 (en]) 1991-09-09

Family

ID=17438745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59267006A Granted JPS61143686A (ja) 1984-12-18 1984-12-18 寸法精度の優れた耐熱性治具用炭化珪素質焼結体

Country Status (1)

Country Link
JP (1) JPS61143686A (en])

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6311589A (ja) * 1986-07-01 1988-01-19 イビデン株式会社 耐熱性治具及びその製造方法
JPH0610684Y2 (ja) * 1989-09-19 1994-03-16 株式会社カイジョー ボンディング装置
US5840436A (en) * 1992-06-08 1998-11-24 Ngk Insulators, Ltd. Spalling-resistant, creep-resistant and oxidation-resistant setters
WO1993025859A1 (en) * 1992-06-08 1993-12-23 Ngk Insulators, Ltd. Shelf plate having anti-spalling, anti-creep and oxidation resistant properties
JP2758313B2 (ja) * 1992-06-08 1998-05-28 日本碍子株式会社 耐スポーリング性棚板

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS578794A (en) * 1980-06-17 1982-01-18 Mitsubishi Chem Ind Ltd Preparation of androstane-type steroid
JPS59101195A (ja) * 1982-11-30 1984-06-11 シャープ株式会社 洗濯機

Also Published As

Publication number Publication date
JPS61143686A (ja) 1986-07-01

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